Thin Film Technology Lecture # 30
Common Deposition Methods for Thin Films in IC Fabrication:
Atomic Layer Deposition (ALD)
The lectures are for M.Sc., M. Phil and Ph.D. Students.
Thin Film Technology Lecture # 30
Common Deposition Methods for Thin Films in IC Fabrication:
Atomic Layer Deposition (ALD)
The lectures are for M.Sc., M. Phil and Ph.D. Students.