{"id":22620,"date":"2016-02-22T17:35:11","date_gmt":"2016-02-23T01:35:11","guid":{"rendered":"http:\/\/lifeboat.com\/blog\/2016\/02\/etch-transfer-into-silicon-of-patterns-with-a-half-pitch-of-under-20nm"},"modified":"2017-06-04T20:09:19","modified_gmt":"2017-06-05T03:09:19","slug":"etch-transfer-into-silicon-of-patterns-with-a-half-pitch-of-under-20nm","status":"publish","type":"post","link":"https:\/\/lifeboat.com\/blog\/2016\/02\/etch-transfer-into-silicon-of-patterns-with-a-half-pitch-of-under-20nm","title":{"rendered":"Etch transfer into silicon of patterns with a half-pitch of under 20nm"},"content":{"rendered":"<p><a class=\"blog-photo\" href=\"https:\/\/lifeboat.com\/blog.images\/etch-transfer-into-silicon-of-patterns-with-a-half-pitch-of-under-20nm.jpg\"><\/a><\/p>\n<p>An etching process based on a three-layer stack achieves transfer into silicon of patterns with a depth of less than 5nm and a half-pitch of less than 20nm written by thermal scanning probe lithography.<\/p>\n<p><!-- Link: <a href=\"http:\/\/spie.org\/newsroom\/technical-articles\/6307-etch-transfer-into-silicon-of-patterns-with-a-half-pitch-of-under-20nm\">http:\/\/spie.org\/newsroom\/technical-articles\/6307-etch-transf...under-20nm<\/a> --><\/p>\n","protected":false},"excerpt":{"rendered":"<p>An etching process based on a three-layer stack achieves transfer into silicon of patterns with a depth of less than 5nm and a half-pitch of less than 20nm written by thermal scanning probe lithography.<\/p>\n","protected":false},"author":395,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[20],"tags":[],"class_list":["post-22620","post","type-post","status-publish","format-standard","hentry","category-futurism"],"_links":{"self":[{"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/posts\/22620","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/users\/395"}],"replies":[{"embeddable":true,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/comments?post=22620"}],"version-history":[{"count":3,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/posts\/22620\/revisions"}],"predecessor-version":[{"id":68286,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/posts\/22620\/revisions\/68286"}],"wp:attachment":[{"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/media?parent=22620"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/categories?post=22620"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/tags?post=22620"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}