{"id":183469,"date":"2024-02-23T21:30:04","date_gmt":"2024-02-24T03:30:04","guid":{"rendered":"https:\/\/lifeboat.com\/blog\/2024\/02\/dynamic-light-manipulation-via-silicon-organic-slot-metasurfaces"},"modified":"2024-02-23T21:30:04","modified_gmt":"2024-02-24T03:30:04","slug":"dynamic-light-manipulation-via-silicon-organic-slot-metasurfaces","status":"publish","type":"post","link":"https:\/\/lifeboat.com\/blog\/2024\/02\/dynamic-light-manipulation-via-silicon-organic-slot-metasurfaces","title":{"rendered":"Dynamic light manipulation via silicon-organic slot metasurfaces"},"content":{"rendered":"<p><a class=\"aligncenter blog-photo\" href=\"https:\/\/lifeboat.com\/blog.images\/dynamic-light-manipulation-via-silicon-organic-slot-metasurfaces.jpg\"><\/a><\/p>\n<p>Relying on sub-wavelength nanostructures, metasurfaces have been shown as promising candidates for replacing conventional free-space optical components by arbitrarily manipulating the amplitude, phase, and polarization of optical wavefronts in certain applications<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" title=\"Arbabi, A. & Faraon, A. Advances in optical metalenses. Nat. Photonics 17, 16&ndash;25 (2023).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR1\" id=\"ref-link-section-d55303873e461\">1<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" title=\"Scheuer, J. Optical metasurfaces are coming of age: Short-and long-term opportunities for commercial applications. ACS Photonics 7, 1323&ndash;1354 (2020).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR2\" id=\"ref-link-section-d55303873e461_1\">2<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 3\" title=\"Kamali, S., Arbabi, E., Arbabi, A. & Faraon, A. A review of dielectric optical metasurfaces for wavefront control. Nanophotonics 7, 1041&ndash;1068 (2018).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR3\" id=\"ref-link-section-d55303873e464\">3<\/a><\/sup>. In recent years, the scope of their applications has been expanded towards complete spatio-temporal control through the introduction of active metasurfaces. These developments open up exciting new possibilities for dynamic holography<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 4\" title=\"Li, J., Chen, Y., Hu, Y., Duan, H. & Liu, N. Magnesium-based metasurfaces for dual-function switching between dynamic holography and dynamic color display. ACS Nano 14, 7892&ndash;7898 (2020).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR4\" id=\"ref-link-section-d55303873e468\">4<\/a><\/sup>, faster spatial light modulators<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 5\" title=\"Shirmanesh, G., Sokhoyan, R., Wu, P. & Atwater, H. Electro-optically tunable multifunctional metasurfaces. ACS Nano 14, 6912&ndash;6920 (2020).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR5\" id=\"ref-link-section-d55303873e472\">5<\/a><\/sup>, and fast optical beam steering for LiDAR<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 6\" title=\"Park, J. et al. All-solid-state spatial light modulator with independent phase and amplitude control for three-dimensional LiDAR applications. Nat. Nanotechnol. 16, 69&ndash;76 (2021).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR6\" id=\"ref-link-section-d55303873e476\">6<\/a><\/sup>. Large efforts have been channeled into various modulation mechanisms<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 7\" title=\"Gu, T., Kim, H., Rivero-Baleine, C. & Hu, J. Reconfigurable metasurfaces towards commercial success. Nat. Photonics 17, 48&ndash;58 (2023).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR7\" id=\"ref-link-section-d55303873e480\">7<\/a><\/sup>. Microelectromechanical and nanoelectromechanical systems (MEMS and NEMS)<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" title=\"Holsteen, A., Cihan, A. & Brongersma, M. Temporal color mixing and dynamic beam shaping with silicon metasurfaces. Science 365257&ndash;260 (2019).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR8\" id=\"ref-link-section-d55303873e485\">8<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" title=\"Kwon, H., Zheng, T. & Faraon, A. Nano-electromechanical Tuning of Dual-Mode Resonant Dielectric Metasurfaces for Dynamic Amplitude and Phase Modulation. Nano Lett. 21, 2817&ndash;2823 (2021).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR9\" id=\"ref-link-section-d55303873e485_1\">9<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" title=\"Kwon, H., Zheng, T. & Faraon, A. Nano-electromechanical spatial light modulator enabled by asymmetric resonant dielectric metasurfaces. Nat. Commun. 13, 1&ndash;8 (2022).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR10\" id=\"ref-link-section-d55303873e485_2\">10<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 11\" title=\"Karvounis, A., Gholipour, B., MacDonald, K. & Zheludev, N. Giant Electro-Optical Effect through Electrostriction in a Nanomechanical Metamaterial. Adv. Mater. 31, 1804801 (2019).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR11\" id=\"ref-link-section-d55303873e488\">11<\/a><\/sup> have the advantages of low-cost and CMOS-compatibility, but the speed is limited up to MHz. Phase-change materials<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" title=\"Fang, Z. et al. Ultra-low-energy programmable non-volatile silicon photonics based on phase-change materials with graphene heaters. Nat. Nanotechnol. 17842&ndash;848 (2022).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR12\" id=\"ref-link-section-d55303873e492\">12<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" title=\"Zhang, Y. et al. Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material. Nat. Nanotechnol. 16661&ndash;666 (2021).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR13\" id=\"ref-link-section-d55303873e492_1\">13<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 14\" title=\"Wang, Y. et al. Electrical tuning of phase-change antennas and metasurfaces. Nat. Nanotechnol. 16667&ndash;672 (2021).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR14\" id=\"ref-link-section-d55303873e495\">14<\/a><\/sup> have fast, drastic, and non-volatile refractive index change, but lack continuous refractive index tuning and have a limited number of cycles constraining applicability to reconfigurable devices. Through molecule reorientation, liquid crystal can have index modulation over 10%, while under relatively low applied voltages Tunable liquid crystal metasurfaces, U.S. patent number 10,665,953 [Application Number 16\/505,687]<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 15\" title=\"Chang, X. et al. Electrically tuned active metasurface towards metasurface-integrated liquid crystal on silicon (meta-LCoS) devices. Opt. Express 31, 5378&ndash;5387 (2023).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR15\" id=\"ref-link-section-d55303873e499\">15<\/a><\/sup>. Techniques of liquid crystal integration have also advanced after decades of development. However, the tuning speeds are limited to kHz range<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 16\" title=\"Moitra, P. et al. Electrically Tunable Reflective Metasurfaces with Continuous and Full-Phase Modulation for High-Efficiency Wavefront Control at Visible Frequencies. ACS Nano. 17, 16952&ndash;16959 (2023).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR16\" id=\"ref-link-section-d55303873e503\">16<\/a><\/sup>. Thermal-optic effects can induce relatively large refractive index changes<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 17\" title=\"Malek, S., Overvig, A., Shrestha, S. & Yu, N. Active nonlocal metasurfaces. Nanophotonics 10655&ndash;665 (2021).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR17\" id=\"ref-link-section-d55303873e507\">17<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 18\" title=\"Horie, Y., Arbabi, A., Arbabi, E., Kamali, S. & Faraon, A. High-speed, phase-dominant spatial light modulation with silicon-based active resonant antennas. Acs Photonics 5, 1711&ndash;1717 (2017).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR18\" id=\"ref-link-section-d55303873e510\">18<\/a><\/sup>, but the speed is inherently limited and the on-chip thermal management can be challenging. The co-integration of transparent conductive oxide and metallic plasmonic structures<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 5\" title=\"Shirmanesh, G., Sokhoyan, R., Wu, P. & Atwater, H. Electro-optically tunable multifunctional metasurfaces. ACS Nano 14, 6912&ndash;6920 (2020).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR5\" id=\"ref-link-section-d55303873e514\">5<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 6\" title=\"Park, J. et al. All-solid-state spatial light modulator with independent phase and amplitude control for three-dimensional LiDAR applications. Nat. Nanotechnol. 16, 69&ndash;76 (2021).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR6\" id=\"ref-link-section-d55303873e517\">6<\/a><\/sup> has been demonstrated in epsilon-near-zero (ENZ) regime to control the wavefront of reflected light, but the low reflection amplitude induced by the optical loss of the materials and the ENZ regime is unavoidable.<\/p>\n<p>In modern photonics, a multitude of technologies for tunable optics and frequency conversion<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 19\" title=\"Gaeta, A., Lipson, M. & Kippenberg, T. Photonic-chip-based frequency combs. Nat. Photonics 13158&ndash;169 (2019).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR19\" id=\"ref-link-section-d55303873e524\">19<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 20\" title=\"Agrawal, G. Nonlinear fiber optics. Nonlinear Science At The Dawn Of The 21st Century. pp. 195-211 (2000)\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR20\" id=\"ref-link-section-d55303873e527\">20<\/a><\/sup> are realized with nonlinear materials that have low loss and a strong <i>\u03c7<\/i><sup><\/sup> effect, such as lithium niobate<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 21\" title=\"Wang, C. et al. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. Nature 562101&ndash;104 (2018).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR21\" id=\"ref-link-section-d55303873e535\">21<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 22\" title=\"Weiss, A. et al. Tunable metasurface using thin-film lithium niobate in the telecom regime. ACS Photonics 9605&ndash;612 (2022).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR22\" id=\"ref-link-section-d55303873e538\">22<\/a><\/sup>, aluminum nitride<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 23\" title=\"Xiong, C., Pernice, W. & Tang, H. Low-loss, silicon integrated, aluminum nitride photonic circuits and their use for electro-optic signal processing. Nano Lett. 12, 3562&ndash;3568 (2012).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR23\" id=\"ref-link-section-d55303873e542\">23<\/a><\/sup>, and organic electro-optic (OEO) materials<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 24\" title=\"Melikyan, A. et al. High-speed plasmonic phase modulators. Nat. Photonics 8229&ndash;233 (2014).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR24\" id=\"ref-link-section-d55303873e546\">24<\/a><\/sup>. Their ultrafast responses make it possible to use RF or millimeter-wave control<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 25\" title=\"Murata, H. Millimeter-wave-band electro-optic modulators using antenna-coupled electrodes for microwave photonic applications. J. Lightwave Technol. 38, 5485&ndash;5491 (2020).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR25\" id=\"ref-link-section-d55303873e551\">25<\/a><\/sup>. Developments in computational chemistry have also led to artificially engineered organic molecules that have record-high nonlinear coefficients with long-term and high-temperature stability<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 26\" title=\"Xu, H. et al. Electro-Optic Activity in Excess of 1,000 pm V-1 Achieved via Theory-Guided Organic Chromophore Design. Adv. Mater. 33, 2104174 (2021).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR26\" id=\"ref-link-section-d55303873e555\">26<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 27\" title=\"Xu, H. et al. Ultrahigh electro-optic coefficients, high index of refraction, and long-term stability from Diels-Alder cross-linkable binary molecular glasses. Chem. Mater. 32, 1408&ndash;1421 (2020).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR27\" id=\"ref-link-section-d55303873e558\">27<\/a><\/sup>. However, their potential in modifying free-space light has been relatively unexplored until recently. Several OEO material-hybrid designs have demonstrated improved tunability of metasurfaces<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" title=\"Zhang, J. et al. Electrical tuning of metal-insulator-metal metasurface with electro-optic polymer. Appl. Phys. Lett. 113, 231102 (2018).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR28\" id=\"ref-link-section-d55303873e562\">28<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" title=\"Benea-Chelmus, I. et al. Electro-optic spatial light modulator from an engineered organic layer. Nat. Commun. 12, 1&ndash;10 (2021).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR29\" id=\"ref-link-section-d55303873e562_1\">29<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 30\" title=\"Sun, X. et al. Design and theoretical characterization of high speed metasurface modulators based on electro-optic polymer. Opt. Express 29, 9207&ndash;9216 (2021).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR30\" id=\"ref-link-section-d55303873e565\">30<\/a><\/sup>. Utilizing dielectric resonant structures and RF-compatible coplanar waveguides, a free-space silicon-organic modulator has recently accomplished GHz modulation speed<sup><a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 31\" title=\"Benea-Chelmus, I. et al. Gigahertz free-space electro-optic modulators based on Mie resonances. Nat. Commun. 13, 1&ndash;9 (2022).\" href=\"https:\/\/www.nature.com\/articles\/s41467-024-45544-0#ref-CR31\" id=\"ref-link-section-d55303873e569\">31<\/a><\/sup>. However, all demonstrations to date require high operating voltages \u00b1 60V, due to low resonance tuning capability (frequency shift \/ voltage), which hinders their integration with electronic chips.<\/p>\n<p>In this work, we propose combining high-Q metasurfaces based on slot-mode resonances with the unique nano-fabrication techniques enabled by OEO materials, which drastically reduces the operating voltage. The low voltage is mainly achieved from the ability to place the electrodes in close proximity to each other while hosting high-Q modes in between and the large overlap of the optical and RF fields in OEO materials. In the following sections, we first provide the design concepts and considerations for achieving a reduced operating voltage. Next, we numerically demonstrate the advantage of a particular selected mode compared to other supported modes in the structure. Finally, we experimentally realize our concepts and characterize the performance of the electro-optic metasurface.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Relying on sub-wavelength nanostructures, metasurfaces have been shown as promising candidates for replacing conventional free-space optical components by arbitrarily manipulating the amplitude, phase, and polarization of optical wavefronts in certain applications1,2,3. In recent years, the scope of their applications has been expanded towards complete spatio-temporal control through the introduction of active metasurfaces. These developments open [\u2026]<\/p>\n","protected":false},"author":661,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[19,1523,4],"tags":[],"class_list":["post-183469","post","type-post","status-publish","format-standard","hentry","category-chemistry","category-computing","category-nanotechnology"],"_links":{"self":[{"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/posts\/183469","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/users\/661"}],"replies":[{"embeddable":true,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/comments?post=183469"}],"version-history":[{"count":0,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/posts\/183469\/revisions"}],"wp:attachment":[{"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/media?parent=183469"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/categories?post=183469"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/lifeboat.com\/blog\/wp-json\/wp\/v2\/tags?post=183469"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}